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UNIT Instruments UFC Mass Flow Controller MFC UFC-3161 UFC-8165 Lot of 15 Spare EMAX-PWR This Rudolph Technologies A16939UNIT Instruments UFC Mass Flow Controller MFC UFC 3161 UFC 8165 Lot of 15 Spare Part No: UFC May Require Calibration Reseller Lot of 15 Included Components Part No: UFC 3161; 100 L, H2 Part No: UFC 3161; 100 SLM, H2 Part No: UFC 8165; 10 L, N2 (Qty. 2) Part No: UFC 8165; 2 L, O2 Part No: UFC 8165; 500 CC, He Part No: UFC 8165; 500 CC, N2 Part No: UFC 8561C; 30 L, H2 (Qty. 2) Part No: UFC 8161; 100 SCCM, SiH4 Part No: UFC 8161; 300 CCM, 2%H2 He Part