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This Novellus Systems 95984-R is manufacturer refurbished
Inventory # A-18260
Part No: 3152334-000
Part No: 520-00829-01 This Lam Research 520-00829-01 Lower Electrode Assembly is used working surplus
Apex 1513 AE Advanced Energy A3L3L000CA140D111A RF Generator Tested Working This Novellus Systems 95984-R isApex 1513 AE Advanced Energy A3L3L000CA140D111A RF Generator Tested Working Part No: A3L3L000CA140D111A Model No: RF Apex 1513 Rev. G F R G Input: 3, 208VAC, 50 60Hz Output: 1. 5kW @ 13. 56MHz CE Marked This item was tested in our facility and is fully functional. The unit has some scuffs to the body and does not include the interlock cover (see photos). The physical condition is good, but there are signs of previous use and handling. Sale Details
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